Thermal stability of amorphous hard carbon films produced by cathodic arc deposition
نویسندگان
چکیده
منابع مشابه
Deposition of permalloy films by filtered cathodic vacuum arc
The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
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The stress relief of tetrahedral amorphous carbon (ta-C ) films by post-deposition thermal annealing was investigated. The films were subjected to rapid thermal annealing (RTA) for 2 min and conventional furnace annealing (CFA) for 30 min. In both cases, the films were annealed in vacuum with argon (4×10−2 Torr) at successive higher temperatures ranging from 500 to 800°C. It was found that anne...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1997
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.120339